Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination

Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination

Author(s):

Petitgrand, S. ( Univ. Paris XI, CNRS (France) )
Bosseboeuf, A. ( Univ. Paris XI, CNRS (France) )

Publication title:

Microsystems Engineering: Metrology and Inspection III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5145

Pub. Year:

2003

Page(from):

33

Page(to):

44

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819450159 [0819450154]

Language:

English

Call no.:

P63600/5145

Type:

Conference Proceedings

Details

TDL ID:	ZA00013130
Series ID:	PA00000029
Conf. info. (Name):	Optical Metrology : Microsystems Engineering: Metrology and Inspection
Conf. info. (Number):	2003 : 3rd
Conf. info. (Venue):	Munich, Germany
Conf. info. (Date):	2003.06.23-2003.06.25

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