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Laser interference methods with focused probing beams for thickness measurements

Author(s):
Publication title:
Current research on holography and interferometric methods for measurement of object properties : 2000-2002
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5134
Pub. Year:
2003
Page(from):
43
Page(to):
49
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450029 [0819450022]
Language:
English
Call no.:
P63600/5134
Type:
Conference Proceedings

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