Blank Cover Image

Influence of Cobalt Contamination in the Measurement of Diffusion Length of p-type CZ Silicon Wafers

Author(s):
Pic, N.
Polignano, M.L.
Caputo, D.
Salva, G.
Sardo, M.
Danel, A.
1 more
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5133
Pub. Year:
2003
Page(from):
505
Page(to):
515
Pages:
11
Pub. info.:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449993 [0819449997]
Language:
English
Call no.:
P63600/5133
Type:
Conference Proceedings

Similar Items:

Pic, N., Polignano, M.L., Caputo, D., Salva, G., Sardo, M., Danel, A.

Electrochemical Society

Polignano,M.L., Bresolin,C., Cazzaniga,F., Sabbadini,A., Queirolo,G.

SPIE-The International Society for Optical Engineering

Polignano, M.L., Bacciaglia, P., Caputo, D., Clementi, C., Padovani, B., Priolo, F., Simpson, T.

Electrochemical Society

Polignano,M.L., Caricato,A.P., Modelli,A., Zonca,R.

SPIE - The International Society for Optical Engineering

Polignano, M.L., Giussani, A., Caputo, D., Clementi, C., Pavia, G., Priolo, F.

Electrochemical Society

Matlosz, M., Berend, P., Coutelle, D., Simon, P.

Electrochemical Society

Caputo, D., Bacciaglia, P., Carpanese, C., Polignano, M.L., Lazzeri, P., Bersani, M., Vanzetti, L., Pianetta, P., Moro, …

SPIE-The International Society for Optical Engineering

Tobin, S. P., Greenwald, A. C., Wolfson, R. G., Meier, D. L., Drevinsky, P. J.

Materials Research Society

Caputo, D., Bacciaglia, P., Carpanese, C., Polignano, M.L., Lazzeri, P., Bersani, M, Vanzetti, L., Pianetta, P., Moro, …

Electrochemical Society

Polignano, M. L., Alessandri, M., Brazzelli, D., Crivelli, B., Ghidini, G., Zonca, R., Caricato, A. P., Bersani, M., …

MRS-Materials Research Society

Ma,Y., Lee,J.L., Benton,J.L., Boone,T., Eaglesham,D.J., Higashi,G.S.

SPIE-The International Society for Optical Engineering

M. Polignano, D. Codegoni, S. Grasso, A. Riva, F. Sammiceli

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12