Blank Cover Image

Two Dimensional Carrier Profiling Using Scanning Capacitance Microscopy

Author(s):
Duhayon, N.
Clarysse, T.
Alvarez, D.
Eyben, P.
Fouchier, M.
Vandervorst, W.
Hellemans, L.
2 more
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5133
Pub. Year:
2003
Page(from):
293
Page(to):
304
Pages:
12
Pub. info.:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449993 [0819449997]
Language:
English
Call no.:
P63600/5133
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Two Dimensional Carrier Profiling Using Scanning Capacitance Microscopy

Duhayon, N., Clarysse, T., Alvarez, D., Eyben, P., Fouchier, M., Vandervorst, W.J., Hellemans, L.

Electrochemical Society
7 Conference Proceedings Quantitative Two-Dimensional Carrier Mapping in Silicon Nanowire-Based Tunnel-Field Effect Transistors Using Scanning Spreading Resistance Microscopy

Andreas Schulze, Thomas Hantschel, Pierre Eyben, Anne Vandooren, Rita Rooyackers, Jay Mody, Anne S. Verhulst, Wilfried …

Materials Research Society
2 Conference Proceedings Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping

Fouchier, M., Eyben, P., Alvarez, D., Duhayon, N., Xu, M.W., Brongersma, S., Lisoni, J., Vandervorst, W.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Peel-off probe: a cost-effective probe for electrical atomic force microscopy

Hantschel,T., Slesazeck,S., Duhayon,N., Xu,M., Vandervorst,W.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Pulsed Force-Scanning Spreading Resistance Microscopy (PF-SSRM) For High Spatial Resolution 2D-Dopant Profiling

Eyben, P., Fouchier, M., Albart, P., Charon-Verstappen, J., Vandervorst, W.

Materials Research Society
9 Conference Proceedings Two-Dimensional Dopant Diffusion Study Using Scanning Capacitance Microscopy

Yu, G. M., Griffin, P. B., Plummer, J. D.

MRS - Materials Research Society
4 Conference Proceedings SSRM And SCM Observation Of Enhanced Lateral As- and BF2-Diffusion Induced By Nitride Spacers

Eyben, P., Duhayon, N., Stuer, C., De Wolf, T., Rooyackers, R., Clarysse, T., Vandervorst, W., Badenes, V.

Materials Research Society
10 Conference Proceedings Scanning Spreading Resistance Microscopy for 3D-Carrier Profiling in FinFET-Based Structures

Jay Mody, Pierre Eyben, Wouter Polspoel, Malgorzata Jurczak, Wilfried Vandervorst

Materials Research Society
5 Conference Proceedings SSRM and SCM Observation of Modified Lateral Diffusion of As, BF2 and Sb Induced by Nitride Spacers

Eyben, P., Duhayon, N., Stuer, C., Wolf, I. De, Rooyackers, R., Clarysse, T., Vandervorst, W., Badenes, G.

Materials Research Society
11 Conference Proceedings Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy

Raineri, V., Giannazzo, F., Calcagno, L., Musumeci, P., Roccaforte, F., La Via, F.

Trans Tech Publications
6 Conference Proceedings Junction and Profile Analysis using Carrier Illumination

Clarysse, T., Vandervorst, W., Lindsay, R., Borden, P., Budiarto, E., Madsen, J., Nijmeijer, R.

Materials Research Society
12 Conference Proceedings Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy

Raineri, V., Giannazzo, F., Calcagno, L., Musumeci, P., Roccaforte, F., La Via, F.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12