Blank Cover Image

Application of X-Ray Fluorescence Spectrometry in Characterization of High-k Ultra-Thin Films

Author(s):
Zhao, C.
Brijs, B.
Dortu, F.
DeGendt, S.
Caymax, M.
Heyns, M.
Besling, W.
Maes, J.W.
3 more
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5133
Pub. date:
2003
Page(from):
243
Page(to):
251
Pages:
9
Pub. info.:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449993 [0819449997]
Language:
English
Call no.:
P63600/5133
Type:
Conference Proceedings

Similar Items:

Zhao, C., Bijjs, B., Dortu, F., DeGendt, S., Caymax, M, Heyns, M, Besling, W, Maes, J.W.

Electrochemical Society

Carter, R.J., Tsai, W., Young, E., Caymax, M., Maes, J.W., Chen, P.J., Delabie, A., Zhao, C., Gendt, S.De, Heyns, M.

Materials Research Society

Zhao, C., DeGendt, S., Caymax, M., Heyns, M., Consier, V., Maes, J.W., Roebben, G., Van Der Biest, O.

SPIE-The International Society for Optical Engineering

8 Conference Proceedings ALD HfO2 Surface Preparation Study

Delabie, Annelies, Caymax, M., Maes, J.W., Bajolet, P., Brijs, B., Cartier, E., Conard, T., Gendt, S.De, Richard, O., …

Materials Research Society

Zhao, C., DeGendt, S., Caymax, M, Heyns, M, Consier, V., Maes, J.W, Roebben, G., Van Der Blest, O.

Electrochemical Society

Caymax, Matty, Bender, H., Brijs, B., Conard, T., Gendt, S. De, Delabie, A., Heyns, M., Onsia, B., Ragnarsson, L., …

Materials Research Society

Brijs,B., Deleu,J., Connard,T., Li,H., Loo,R., Caymax,M., Nakajima,K., Kimura,K., Vandervorst,W.

SPIE - The International Society for Optical Engineering

De Witte, H., Passefort, S., Besling, W., Maes, J.W.H., Eason, K., Youngand, E., Heyns, M.

Electrochemical Society

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

Elshocht, S.Van, Brijs, B., Caymax, M., Conard, T., Gendt, S.De, Kubicek, S., Meuris, M., Onsia, B., Richard, O., …

Materials Research Society

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

Elshocht, S.Van, Brijs, B., Caymax, M., Conard, T., Gendt, S.De, Kubicek, S., Meuris, M., Onsia, B., Richard, O., …

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12