Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UV/VIS-Spectroscopy

Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UV/VIS-Spectroscopy

Author(s):

Publication title:

Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5133

Pub. Year:

2003

Page(from):

177

Page(to):

188

Pages:

12

Pub. info.:

Pennington, NJ: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449993 [0819449997]

Language:

English

Call no.:

P63600/5133

Type:

Conference Proceedings

Details

TDL ID:	ZA00013121
Series ID:	PA00000029
Conf. info. (Name):	ALTECH 2003 : Analytical Techniques for Semiconductor Materials and Process Characterization IV ; Meeting of the Electrochemical Society : Diagnostic Techniques for Semiconductor Materials and Devices VI
Conf. info. (Number):	2003 : 4th ; 202nd : 6th
Conf. info. (Venue):	Paris, France ; Salt Lake City, UT, USA
Conf. info. (Date):	2003.04.00 ; 2002.10.00

Similar Items:

1 Conference Proceedings Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UVIVIS-Spectroscopy Doll, O., Kolbesen, B.O. Electrochemical Society	7 Conference Proceedings ADVANCED SINGLE CHEMISTRY ALKALINE CLEANING IN A SINGLE TANK TOOL Onsia, B., Schellkes, E., Vos, R., De Gendt, S., Doll, O., Fester, A., Kolbesen, B., Hoffman, M., Hatcher, Z., Wolke, … Electrochemical Society
2 Conference Proceedings CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): CA DEGRADATION MONITORING BY UV/VIS SPECTROSCOPY Doll, O., Kolbesen, B. Electrochemical Society	8 Conference Proceedings Preparation and Characterization of Time Dependent Haze Munter,N., Kolbesen,B.O., Storm,W. SPIE - The International Society for Optical Engineering
3 Conference Proceedings Cleaning Chemistry with Complexing Agents (CAs): Direct Concentration Measurement of CAs with HPLC Metzger, S., Kolbesen, B.O. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Blood characterization using UV/vis spectroscopy Y.D. Mattley, F. Mitrani-Gold, S. Orton, C.P. Bacon, G. Leparc Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings Cleaning Chemistry with Complexing Agents (CAs): Direct Concentration Measurement of CAs with HPLC Metzger, S., Kolbesen, B.O. Electrochemical Society	10 Conference Proceedings TXRF Characterization of Inhomogneous Solids: Influence of Surface Morphology Alov, N., Oskolok, K., Wittershagen, A., Kolbesen, B.O. SPIE-The International Society for Optical Engineering
5 Conference Proceedings CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): DECOMPOSITION OF CAs IN HYDROGEN PEROXIDE AND APM STUDIED WITH HPLC Metzger, S., Kolbesen, B.O. Electrochemical Society	11 Conference Proceedings TXRF Characterization of Inhomogneous Solids: Influence of Surface Morphology Alov, N., Oskolok, K., Wittershagen, A., Kolbesen, B.O. Electrochemical Society
6 Conference Proceedings DEGRADATION OF CHELATING AGENTS IN HYDROGEN PEROXIDE AND APM+ SOLUTIONS O. Doll, S. Metzger, B. O. Kolbesen Electrochemical Society	12 Conference Proceedings Process-Induced Defects in Silicon: A Never Ending Story? Kolbesen, B.O., Cerva, H. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12