Blank Cover Image

In-Line Copper Contamination Monitoring Using Non-Contact Q-V-SPV Techniques

Author(s):
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5133
Pub. date:
2003
Page(from):
42
Page(to):
49
Pages:
8
Pub. info.:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449993 [0819449997]
Language:
English
Call no.:
P63600/5133
Type:
Conference Proceedings

Similar Items:

Bohringer, M., Hauber, J., Passefort, S., Eason, K.

Electrochemical Society

Walz, D., Joly, J.P., Suarez, M., Palleau, J., Kamarinos, G.

Electrochemical Society

De Witte, H., Passefort, S., Besling, W., Maes, J.W.H., Eason, K., Youngand, E., Heyns, M.

Electrochemical Society

Kondoh, E., Trauwaert, M.-A., Heyns, M., Maex, K.

Electrochemical Society

3 Conference Proceedings SCA and SPV in line monitoring

Barla,K., Levy,D., Fleury,A., Reynard,J.P., Kwakman,L.

SPIE-The International Society for Optical Engineering

Low,K.S., Schwerd,M., Koerner,H., Barth,H.J., O'Neil,A.

SPIE - The International Society for Optical Engineering

Lagowski, J., Edelman, P.

Electrochemical Society

Walz, D., Joly, J.P., Kamarinos, G., Barla, K.

Electrochemical Society

Roman, P., Kashkoush, I., Novak, R.E., Kamieniecki, E., Ruzyllo, J.

Electrochemical Society

Xanthos, M., Grenci, J., Jacob, C., Dagli, S. S., Kotlar, H. K.

Society of Plastics Engineers, Inc. (SPE)

Enoki, M., Nishinoiri, S.

SPIE - The International Society of Optical Engineering

Metz, J.M., Radicati, F., Craig, A.Y., Hockett, R.S.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12