Semiconductor sidewall shape estimation using top-down CD-SEM image retrieval
- Author(s):
- Price, J.R. ( Oak Ridge National Lab. (USA) )
- Bingham, P.R. ( Oak Ridge National Lab. (USA) )
- Tobin, K.W., Jr. ( Oak Ridge National Lab. (USA) )
- Karnowski, T.P. ( Oak Ridge National Lab. (USA) )
- Publication title:
- Sixth International Conference on Quality Control by Artificial Vision
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5132
- Pub. Year:
- 2003
- Page(from):
- 209
- Page(to):
- 219
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449986 [0819449989]
- Language:
- English
- Call no.:
- P63600/5132
- Type:
- Conference Proceedings
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