Blank Cover Image

Investigation on micro-trench formation of alternating aperture phase shift masks

Author(s):
  • Kwon, S.-W. ( DuPont Photomasks Korea Ltd. (South Korea) )
  • Jeong, H.-S. ( DuPont Photomasks Korea Ltd. (South Korea) )
  • Kim, L.-J. ( DuPont Photomasks Korea Ltd. (South Korea) )
  • Ahn, C.-N. ( DuPont Photomasks Korea Ltd. (South Korea) )
  • Kim, H.-S. ( DuPont Photomasks Korea Ltd. (South Korea) )
Publication title:
Photomask and Next-Generation Lithography Mask Technology X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5130
Pub. date:
2003
Page(from):
796
Page(to):
803
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449962 [0819449962]
Language:
English
Call no.:
P63600/5130
Type:
Conference Proceedings

Similar Items:

Chang, B. -S., Chang, Y. -Y., Bang, S. -H., Lee, I. -S., Kim, L. -J., Ahn, C.-N., Kim, H. -S.

SPIE - The International Society of Optical Engineering

Shin,I.-G., Lee,S.-W., Kim,Y.-H., Choi,S.-W., Han,W.-S., Sohn,J.-M., Lim,T.-K.

SPIE-The International Society for Optical Engineering

Koo,S.-S., Kim,H.-B., Yune,H.-S., Hong,J.-S., Paek,S.-W., Eom,T.-S., Ahn,C.-N., Ham,Y.-M., Baik,K.-H., Lee,K.-Y., …

SPIE-The International Society for Optical Engineering

Cha,H.-S., Choi,S.-J., Yoon,S.-Y., Jung,S.-M., Choi,S.-S., Jeong,S.-H.

SPIE-The International Society for Optical Engineering

Tsai,W., Qian,Q., Buckmann,K.M., Cheng,W.-H., He,L., Irvine,B., Kamna,M., Korobko,Y., Kovalchick,M., Labovitz,S.M., …

SPIE-The International Society for Optical Engineering

Chang, C.-H., Hsieh, C.-H., Tzu, S.-D., Dai, C.-M., Lin, B. J., Pang, L., Qian, Q.-D., Chen, J.-H., Huang, J. H.

SPIE-The International Society for Optical Engineering

Lim,S.-C., Kye,J.-W., Woo,S.-G., Kim,S.-G., Kang,H.-Y., Han,W.-S., Koh,Y.-B.

SPIE-The International Society for Optical Engineering

Lee,S.-W., Shin,I.-G., Kim,Y.-H., Choi,S.-W., Han,W.-S., Yoon,H.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering

Liang, F. -J., Chen, C. -K., Shin, J. -J., You, J. -W., Lin, C. -H., Pan, Z. -Y., Shu, K. -C., Gau, T. -S., Lin, B. J.

SPIE - The International Society of Optical Engineering

Liebmann,L.W., Graur,I.C., Leipold,W.C., Oberschmidt,J.M., O'Grady,D.S., Regaill,D.

SPIE - The International Society for Optical Engineering

Paek,S.W., Kim,H.-B., Ahn,C.-N., Koo,Y.-M., Baik,K.-H.

SPIE - The International Society for Optical Engineering

Park, J.R., Kim, S.-H., Lee, H.-J., Jang, I.-Y., Choi, Y.-H., Yang, S.-H., Lee, Y.-H., Kim, Y.-H., Choi, S.-W., Yoon, …

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12