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Investigation on micro-trench formation of alternating aperture phase shift masks

Author(s):
  • Kwon, S.-W. ( DuPont Photomasks Korea Ltd. (South Korea) )
  • Jeong, H.-S. ( DuPont Photomasks Korea Ltd. (South Korea) )
  • Kim, L.-J. ( DuPont Photomasks Korea Ltd. (South Korea) )
  • Ahn, C.-N. ( DuPont Photomasks Korea Ltd. (South Korea) )
  • Kim, H.-S. ( DuPont Photomasks Korea Ltd. (South Korea) )
Publication title:
Photomask and Next-Generation Lithography Mask Technology X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5130
Pub. Year:
2003
Page(from):
796
Page(to):
803
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449962 [0819449962]
Language:
English
Call no.:
P63600/5130
Type:
Conference Proceedings

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