Phase defect printability analysis for chromeless phase lithography technology

Phase defect printability analysis for chromeless phase lithography technology

Author(s):

Huh, S. ( Samsung Electronics Co., Ltd. (South Korea) )

Park, J.H. ( Samsung Electronics Co., Ltd. (South Korea) )

Chung, D.-H. ( Samsung Electronics Co., Ltd. (South Korea) )

Kim, C.-H. ( Samsung Electronics Co., Ltd. (South Korea) )

Shin, I.-K. ( Samsung Electronics Co., Ltd. (South Korea) )

Choi, S.-W. ( Samsung Electronics Co., Ltd. (South Korea) )

Sohn, J.-M. ( Samsung Electronics Co., Ltd. (South Korea) )

2 more

Publication title:

Photomask and Next-Generation Lithography Mask Technology X

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5130

Pub. Year:

2003

Page(from):

787

Page(to):

795

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449962 [0819449962]

Language:

English

Call no.:

P63600/5130

Type:

Conference Proceedings

Details

TDL ID:	ZA00013118
Series ID:	PA00000029
Conf. info. (Name):	Photomask and next-generation lithography mask technology
Conf. info. (Number):	2003 : 10th
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	2003.04.16-2003.04.18

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