Defect printability and inspection capability for tri-tone PSM

Defect printability and inspection capability for tri-tone PSM

Author(s):

Nagamura, Y. ( Mitsubishi Electric Corp. (Japan) )

Maetoko, K. ( Mitsubishi Electric Corp. (Japan) )

Maeshima, K. ( Mitsubishi Electric Corp. (Japan) )

Tamada, N. ( Mitsubishi Electric Corp. (Japan) )

Hosono, K. ( Mitsubishi Electric Corp. (Japan) )

Fujimoto, M. ( Toppan Printing Co., Ltd. (Japan) )

Kodera, Y. ( Toppan Printing Co., Ltd. (Japan) )

Goto, K. ( Toppan Printing Co., Ltd. (Japan) )

Narita, T. ( Toppan Printing Co., Ltd. (Japan) )

Matsuo, F. ( Toppan Printing Co., Ltd. (Japan) )

Akima, S. ( Toppan Printing Co., Ltd. (Japan) )

Ishijima, M. ( Toppan Printing Co., Ltd. (Japan) )

Iwasaki, H. ( Toppan Printing Co., Ltd. (Japan) )

Kikuchi, Y. ( Toppan Printing Co., Ltd. (Japan) )

9 more

Publication title:

Photomask and Next-Generation Lithography Mask Technology X

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5130

Pub. Year:

2003

Page(from):

454

Page(to):

465

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449962 [0819449962]

Language:

English

Call no.:

P63600/5130

Type:

Conference Proceedings

Details

TDL ID:	ZA00013118
Series ID:	PA00000029
Conf. info. (Name):	Photomask and next-generation lithography mask technology
Conf. info. (Number):	2003 : 10th
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	2003.04.16-2003.04.18

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