Defect printability and inspection capability for tri-tone PSM
- Author(s):
Nagamura, Y. ( Mitsubishi Electric Corp. (Japan) ) Maetoko, K. ( Mitsubishi Electric Corp. (Japan) ) Maeshima, K. ( Mitsubishi Electric Corp. (Japan) ) Tamada, N. ( Mitsubishi Electric Corp. (Japan) ) Hosono, K. ( Mitsubishi Electric Corp. (Japan) ) Fujimoto, M. ( Toppan Printing Co., Ltd. (Japan) ) Kodera, Y. ( Toppan Printing Co., Ltd. (Japan) ) Goto, K. ( Toppan Printing Co., Ltd. (Japan) ) Narita, T. ( Toppan Printing Co., Ltd. (Japan) ) Matsuo, F. ( Toppan Printing Co., Ltd. (Japan) ) Akima, S. ( Toppan Printing Co., Ltd. (Japan) ) Ishijima, M. ( Toppan Printing Co., Ltd. (Japan) ) Iwasaki, H. ( Toppan Printing Co., Ltd. (Japan) ) Kikuchi, Y. ( Toppan Printing Co., Ltd. (Japan) ) - Publication title:
- Photomask and Next-Generation Lithography Mask Technology X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5130
- Pub. Year:
- 2003
- Page(from):
- 454
- Page(to):
- 465
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449962 [0819449962]
- Language:
- English
- Call no.:
- P63600/5130
- Type:
- Conference Proceedings
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