Shot number analysis at 65-nm node mask writing using VSB writer
- Author(s):
Hirumi, J. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Kuriyama, K. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Yoshioka, N. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Yoshikawa, R. ( NuFlare Technology Inc. (Japan) ) Hojo, Y. ( Hitachi High-Technologies Corp. (Japan) ) Matuzaka, T. ( Hitachi High-Technologies Corp. (Japan) ) Tanaka, K. ( JEOL Ltd. (Japan) ) Hoga, M. ( Dai Nippon Printing Co., Ltd. (Japan) ) - Publication title:
- Photomask and Next-Generation Lithography Mask Technology X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5130
- Pub. Year:
- 2003
- Page(from):
- 309
- Page(to):
- 317
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449962 [0819449962]
- Language:
- English
- Call no.:
- P63600/5130
- Type:
- Conference Proceedings
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