Advanced NLD mask dry etching system for 90-nm node technology

Advanced NLD mask dry etching system for 90-nm node technology

Author(s):

Harashima, N. ( ULVAC Coating Corp. (Japan) )

Sasaki, T. ( ULVAC Coating Corp. (Japan) )

Kuwahara, K. ( ULVAC, Inc. (Japan) )

Hayashi, T. ( ULVAC, Inc. (Japan) )

Tanaka, Y. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )

Yoshioka, N. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )

Hara, M. ( HOYA Corp. (Japan) )

Ohkubo, Y. ( HOYA Corp. (Japan) )

3 more

Publication title:

Photomask and Next-Generation Lithography Mask Technology X

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5130

Pub. Year:

2003

Page(from):

275

Page(to):

280

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449962 [0819449962]

Language:

English

Call no.:

P63600/5130

Type:

Conference Proceedings

Details

TDL ID:	ZA00013118
Series ID:	PA00000029
Conf. info. (Name):	Photomask and next-generation lithography mask technology
Conf. info. (Number):	2003 : 10th
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	2003.04.16-2003.04.18

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