Pulsed laser deposition of ZnO thin films in silicon and sapphire

Pulsed laser deposition of ZnO thin films in silicon and sapphire

Author(s):

Khudobenko, A.I. ( Institute on Laser and Information Technologies (Russia) )

Zherikhin, A.N. ( Institute on Laser and Information Technologies (Russia) )

Williams, R.T. ( Wake Forest Univ. (USA) )

Wilkinson, J. ( Wake Forest Univ. (USA) )

Ucer, K.B. ( Wake Forest Univ. (USA) )

Xiong, G. ( Wake Forest Univ. (USA) )

Voronov, V.V. ( General Physics Institute (Russia) )

2 more

Publication title:

Laser Processing of Advanced Materials and Laser Microtechnologies

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5121

Pub. Year:

2003

Page(from):

317

Page(to):

324

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449818 [0819449814]

Language:

English

Call no.:

P63600/5121

Type:

Conference Proceedings

Details

TDL ID:	ZA00013109
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Lasers, Applications, and Technologies
Conf. info. (Number):	2002
Conf. info. (Venue):	Moscow, Russia
Conf. info. (Date):	2002.06.22-2002.06.27

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