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Laser technology of SNOM-tips fabrication: process diagnostics, processing, and testing

Author(s):
  • Veiko, V.P. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
  • Kalachev, A.N. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
  • Kaporsky, L.N. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
  • Volkov, S.A. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
  • Voznesensky, N.B. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
Publication title:
Laser Processing of Advanced Materials and Laser Microtechnologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5121
Pub. Year:
2003
Page(from):
164
Page(to):
174
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449818 [0819449814]
Language:
English
Call no.:
P63600/5121
Type:
Conference Proceedings

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