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Stress-induced leakage currents of silicon oxides in flash EEPROM transistor

Author(s):
Kang, C.S. ( Yuhan College (South Korea) )  
Publication title:
Nanotechnology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5118
Pub. Year:
2003
Page(from):
620
Page(to):
627
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449788 [0819449784]
Language:
English
Call no.:
P63600/5118
Type:
Conference Proceedings

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