Electrical characterization of atomic-force microscopy grown SiO2
- Author(s):
- Blasco, X. ( Univ. Autonoma de Barcelona (Spain) )
- Nafria, M. ( Univ. Autonoma de Barcelona (Spain) )
- Aymerich, X. ( Univ. Autonoma de Barcelona (Spain) )
- Publication title:
- Nanotechnology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5118
- Pub. Year:
- 2003
- Page(from):
- 558
- Page(to):
- 564
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449788 [0819449784]
- Language:
- English
- Call no.:
- P63600/5118
- Type:
- Conference Proceedings
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