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High-voltage atomic force microscopy: a new technology for nanoscale optical devices (Invited Paper)

Author(s):
Publication title:
Nanotechnology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5118
Pub. date:
2003
Page(from):
213
Page(to):
220
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449788 [0819449784]
Language:
English
Call no.:
P63600/5118
Type:
Conference Proceedings

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