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Semiconductor gas sensor compatibility with CMOS technologies

Author(s):
Lopez-Bosque, M.J. ( Ctr. Nacional de Microelectronica (Spain) )
Plaza, J.A. ( Ctr. Nacional de Microelectronica (Spain) )
Santander, J. ( Ctr. Nacional de Microelectronica (Spain) )
Gracia, I. ( Ctr. Nacional de Microelectronica (Spain) )
Cane, C. ( Ctr. Nacional de Microelectronica (Spain) )
Wollenstein, J. ( Fraunhofer-Institut fur Physikalische Mebtechnik (Germany) )
Moretton, E. ( Fraunhofer-Institut fur Physikalische Mebtechnik (Germany) )
Lambrecht, A. ( Fraunhofer-Institut fur Physikalische Mebtechnik (Germany) )
Schjolberg-Henriksen, K. ( Univ. of Oslo (Norway) )
4 more
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
2
Pt.:
Poster Session
Page(from):
790
Page(to):
801
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

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