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New method decreasing drive voltage of torsion beam actuator micromechanical optical switches

Author(s):
Dong, W. ( Jilin Univ. (China) )
Zhang, X. ( Jilin Univ. (China) )
Liu, C. ( Jilin Univ. (China) )
Jia, C. ( Jilin Univ. (China) )
Pan, J. ( Jilin Univ. (China) )
Ji, P. ( Jilin Univ. (China) )
Chen, W. ( Jilin Univ. (China) )
2 more
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
2
Pt.:
Poster Session
Page(from):
652
Page(to):
657
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

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