New method decreasing drive voltage of torsion beam actuator micromechanical optical switches
- Author(s):
Dong, W. ( Jilin Univ. (China) ) Zhang, X. ( Jilin Univ. (China) ) Liu, C. ( Jilin Univ. (China) ) Jia, C. ( Jilin Univ. (China) ) Pan, J. ( Jilin Univ. (China) ) Ji, P. ( Jilin Univ. (China) ) Chen, W. ( Jilin Univ. (China) ) - Publication title:
- Smart Sensors, Actuators, and MEMS
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5116
- Pub. Year:
- 2003
- Vol.:
- 2
- Pt.:
- Poster Session
- Page(from):
- 652
- Page(to):
- 657
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449764 [0819449768]
- Language:
- English
- Call no.:
- P63600/5116
- Type:
- Conference Proceedings
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