Modification on surface roughness by combining dry and wet etching

Modification on surface roughness by combining dry and wet etching

Author(s):

Lee, C.-C. ( National Chiao Tung Univ. (Taiwan) )
Hsu, W. ( National Chiao Tung Univ. (Taiwan) )

Publication title:

Smart Sensors, Actuators, and MEMS

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5116

Pub. Year:

2003

Vol.:

2

Pt.:

Session 10

Page(from):

627

Page(to):

635

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449764 [0819449768]

Language:

English

Call no.:

P63600/5116

Type:

Conference Proceedings

Details

TDL ID:	ZA00013104
Series ID:	PA00000029
Conf. info. (Name):	Microtechnologies for the New Millennium : Smart Sensors, Actuators, and MEMS
Conf. info. (Number):	2003
Conf. info. (Venue):	Maspalomas, Gran Canaria, Spain
Conf. info. (Date):	2003.05.19-2003.05.21
Note for article:	Session 10. MEMS III ; 5116-80

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