Characterization of front- to backwafer alignment and bulk micromachining using electrical overlay test structures
- Author(s):
- van Zeijl, H.W. ( Technische Univ. Delft (Netherlands) )
- Slabbekoorn, J. ( Technische Univ. Delft (Netherlands) )
- Publication title:
- Smart Sensors, Actuators, and MEMS
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5116
- Pub. Year:
- 2003
- Vol.:
- 2
- Pt.:
- Session 10
- Page(from):
- 617
- Page(to):
- 626
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449764 [0819449768]
- Language:
- English
- Call no.:
- P63600/5116
- Type:
- Conference Proceedings
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