Blank Cover Image

A four-bit digital MEMS phase shifter

Author(s):
  • Zhu, J. ( Southeast Univ. (China) )
  • Zhou, B. ( Southeast Univ. (China) )
  • Lin, J. ( Nanjing Electronic Devices Institute (China) )
  • Yu, Y. ( Nanjing Electronic Devices Institute (China) )
  • Lu, L. ( Nanjing Electronic Devices Institute (China) )
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
2
Pt.:
Session 9
Page(from):
571
Page(to):
576
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Computer reconstruction by phase-shifting digital holography

Yu, Y., Lu, Z., Jiao, Y.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Real-time digital image stabilization algorithm on PC

Sun, Y., Zhao, Y.J., Zhou, Y.B., Liu, M.Q., Lu, H., Yu, F.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings High-isolation contact switch in MEMS phase shifter

Li, W., Shi, Y., Qing, J., Jiang, L., Ren, Z., Xin, P., Zhu, Z., Lai, Z.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Infrared phase-shifting digital interferometer

Chen,J., Chen,L., Huang,S., Jin,G.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Pattern-dependence optical phase effect on alternating phase shift mask

Chang, B.-C., You, J.-W., Lu, M., Lee, C.-L., Kung, L.-W., Shu, K.-C., Shin, J.-J., Gau, T.-S., Lin, B.J.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Surface roughness measurement using infrared phase-shifting digital interferometer

He, Y., Chen, L., Wang, Q., Chen, J.B.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Information reconstruction based on phase-shifting technique in digital holography

Jiao, Y., Yu, Y., Lu, Z.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Numerical compensation in phase-shifting in-line lensless Fourier digital holographic microscopy

Yuan, C., Zhong, L., Lv, X., Zhu, Y.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Application of MEMS technology in optical communications

Lu, Y., Lin, J.L.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Phase shifting interferograms processing for fiber point-diffraction interferometer

L. Nie, J. Han, X. Yu, B. Liu, X. Jiang

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Ta-Si-O absorptive shifter for the attenuated phase-shifting mask

Yan,Y.-S., Cheng,C.-C., Lin,C.-L., Gan,J.-Y., Wu,T.B., Tuo,L.C., Wang,J.J.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Coupled analysis on the micro-airflow and its actuator for MEMS fluidic devices

L. Li, R. Zhu, Z. Zhou, J. Ren

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12