MEMS mirror array for a wavelength-selective 1xK switch (Invited Paper)

MEMS mirror array for a wavelength-selective 1xK switch (Invited Paper)

Author(s):

Lopez, D.O. ( Lucent Technologies/Bell Labs. (USA) )

Pardo, F. ( Lucent Technologies/Bell Labs. (USA) )

Aksyuk, V.A. ( Lucent Technologies/Bell Labs. (USA) )

Simon, M.E. ( Lucent Technologies/Bell Labs. (USA) )

Shea, H.R. ( Lucent Technologies/Bell Labs. (USA) )

Marom, D.M. ( Lucent Technologies/Bell Labs. (USA) )

Neilson, D.T. ( Lucent Technologies/Bell Labs. (USA) )

Cirelli, R.A. ( Lucent Technologies/Bell Labs. (USA) )

Klemens, F.P. ( New Jersey Nanotechnology Consortium (USA) )

Mansfield, W.M. ( Lucent Technologies/Bell Labs. (USA) )

Fetter, L.A. ( New Jersey Nanotechnology Consortium (USA) )

Bower, E. ( Lucent Technologies/Bell Labs. (USA) )

Miner, J.F. ( Lucent Technologies/Bell Labs. (USA) )

Sorsch, T.W. ( Lucent Technologies/Bell Labs. (USA) )

9 more

Publication title:

Smart Sensors, Actuators, and MEMS

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5116

Pub. Year:

2003

Vol.:

2

Pt.:

Session 8

Page(from):

445

Page(to):

455

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449764 [0819449768]

Language:

English

Call no.:

P63600/5116

Type:

Conference Proceedings

Details

TDL ID:	ZA00013104
Series ID:	PA00000029
Conf. info. (Name):	Microtechnologies for the New Millennium : Smart Sensors, Actuators, and MEMS
Conf. info. (Number):	2003
Conf. info. (Venue):	Maspalomas, Gran Canaria, Spain
Conf. info. (Date):	2003.05.19-2003.05.21
Note for article:	Session 8. Optical Applications ; 5116-59

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