A novel method for the measurement of the residual stress of surface-micromachined structures for MEMS (Invited Paper)

A novel method for the measurement of the residual stress of surface-micromachined structures for MEMS (Invited Paper)

Author(s):

Kim, J.-H. ( Seoul National Univ. (South Korea) )

Kim, J.-G. ( Seoul National Univ. (South Korea) )

Yeon, S.-C. ( Seoul National Univ. (South Korea) )

Hahn, J.-H. ( Korea Research Institute of Standards and Science (South Korea) )

Lee, H.-Y. ( Seoul National Univ. (South Korea) )

Kim, Y.-H. ( Seoul National Univ. (South Korea) )

1 more

Publication title:

Smart Sensors, Actuators, and MEMS

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5116

Pub. Year:

2003

Vol.:

1

Pt.:

Session 7

Page(from):

370

Page(to):

382

Pages:

13

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449764 [0819449768]

Language:

English

Call no.:

P63600/5116

Type:

Conference Proceedings

Details

TDL ID:	ZA00013104
Series ID:	PA00000029
Conf. info. (Name):	Microtechnologies for the New Millennium : Smart Sensors, Actuators, and MEMS
Conf. info. (Number):	2003
Conf. info. (Venue):	Maspalomas, Gran Canaria, Spain
Conf. info. (Date):	2003.05.19-2003.05.21
Note for article:	Seesion 7. MEMS II ; 5116-50

Similar Items:

1 Conference Proceedings Measurement of the residual stresses of the handing structures used in MEMS Rigo, S., Desmarres, J.M., Masri, T., Petit, J.A. SPIE-The International Society for Optical Engineering	7 Conference Proceedings (250f) Novel Method for Measurement of Crystal Growth Rate Dae Ryook Yang, Do Yeon Kim, Na Ri Lee American Institute of Chemical Engineers
2 Conference Proceedings Optical MEMS devices for telecom systems (Invited Paper) Pardo, F., Aksyuk, V.A., Arney, S., Bair, H., Basavanhally, N.R., Bishop, D.J., Bogart, G.R., Bolle, C.A., Bower, J.E., … SPIE-The International Society for Optical Engineering	8 Conference Proceedings Dynamic light field synthesis using spatial light modulator: system optimization with genetic feedback tuning loop and optical implementation of iterative … Lee B., Hahn J., Kim H. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Residual stresses in MEMS structures Majumdar, B. S., Cowan, W. D., Pagano, N. J. MRS-Materials Research Society	9 Conference Proceedings Optical methods for the measurement of MEMS materials and structures He,X.Y., Kang,X., Quan,C., Tay,C.J., Wang,S.H., Shang,H.M. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Evaluation of residual stress in MEMS structures by digital holography Coppala, G., De Nicola, S., Ferraro, P., Finizio, A., Grilli, S., Iodis, M., Margo, C., Pierattini, G. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Photoelastic tomography for residual stress measurement in glass (Invited Paper) Aben, H., Errapart, A., Ainola, L., Anton, J. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Surface-plasmon coupling in subwavelength periodic structures (Invited Paper) Choi, K. Y., Yoon, J., Song, S. H, Oh, C. H., Kim, P. S. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Quantum-structure dependent excitonic carrier dynamics of InxGal-xN/GaN multi-quantum-wells (Invited Paper) [6121-04] Hong, S., Kim, Y. S., Yoon, Y.J., Park, J.S., Kim, B. K., Fomin, A., Lee, G. H., Kim, J.W., Cho, H.K., Joo, T. SPIE - The International Society of Optical Engineering
6 Conference Proceedings (250f) Novel Method for Measurement of Crystal Growth Rate Dae Ryook Yang, Do Yeon Kim, Na Ri Lee American Institute of Chemical Engineers	12 Conference Proceedings A novel method of creating a surface micromachined 3D optical assembly for MEMS-based miniaturized FTIR spectrometers D. Reyes, E. R. Schildkraut, J. Kim, R. F. Connors, P. Kotidis Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12