Simulation of bulk micromachined vibration sensor with low noise

Author(s):

• Liu, X. ( Harbin Institute of Technology (China) )
• Huo, M. ( Harbin Institute of Technology (China) )
• Chen, W. ( Harbin Institute of Technology (China) )
• Chen, Q. ( Harbin Institute of Technology (China) )

Publication title:

Smart Sensors, Actuators, and MEMS

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5116

Pub. Year:

2003

Vol.:

1

Pt.:

Session 6

Page(from):

364

Page(to):

369

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449764 [0819449768]

Language:

English

Call no.:

P63600/5116

Type:

Conference Proceedings