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Shell-type micromechanical oscillator

Author(s):
Zalalutdinov, M. ( Cornell Univ. (USA) )
Aubin, K.L. ( Cornell Univ. (USA) )
Michael, C. ( Univ. of Illinois/Urbana-Champaign (USA) )
Reichenbach, R.B. ( Cornell Univ. (USA) )
Alan, T. ( Cornell Univ. (USA) )
Zehnder, A.T. ( Cornell Univ. (USA) )
Houston, B.H. ( Naval Research Lab. (USA) )
Parpia, J.M. ( Cornell Univ. (USA) )
Craighead, H.G. ( Cornell Univ. (USA) )
4 more
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
1
Pt.:
Session 4
Page(from):
229
Page(to):
236
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

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