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High-performance polysilicon air-gap thin film transistor on low-temperature substrates

Author(s):
Mahfoz-Kotb, H. ( Univ. de Rennes I (France) )
Salaun, A.-C. ( Univ. de Rennes I (France) )
Mohammed-Brahim, T. ( Univ. de Rennes I (France) )
Coulon, N. ( Univ. de Rennes I (France) )
Bonnaud, O. ( Univ. de Rennes I (France) )
Mevellec, J.-Y. ( Institut des Materiaux de Nantes (France) )
1 more
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
1
Pt.:
Session 3
Page(from):
168
Page(to):
175
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

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