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SOI-silicon as structural layer for NEMS applications

Author(s):
Villarroya, M. ( Univ. Autonoma de Barcelona (Spain) )
Figueras, E. ( Ctr. Nacional de Microelectronica (Spain) )
Perez-Murano, F. ( Ctr. Nacional de Microelectronica (Spain) )
Campabadal, F. ( Ctr. Nacional de Microelectronica (Spain) )
Esteve, J. ( Ctr. Nacional de Microelectronica (Spain) )
Barniol, N. ( Univ. Autonoma de Barcelona (Spain) )
1 more
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
1
Pt.:
Session 1
Page(from):
1
Page(to):
11
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

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