Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique

Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique

Author(s):

Song, I.-H. ( Louisiana State Univ. (USA) )
Kopparthi, S. ( Louisiana State Univ. (USA) )
Ajmera, P.K. ( Louisiana State Univ. (USA) )
Srivastava, A. ( Louisiana State Univ. (USA) )

Publication title:

Smart structures and materials 2003 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 3-6 March 2003, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5055

Pub. Year:

2003

Page(from):

78

Page(to):

86

Pages:

9

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448606 [0819448605]

Language:

English

Call no.:

P63600/5055

Type:

Conference Proceedings

Details

TDL ID:	ZA00013046
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures and Materials
Conf. info. (Number):	2003
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2003.03.03-2003.03.06

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