MEMS-fabricated ICPF actuators for biological manipulation
- Author(s):
- Publication title:
- Smart structures and materials 2003 : Electroactive polymer actuators and devices (EAPAD) : 3-6 March 2003, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5051
- Pub. Year:
- 2003
- Page(from):
- 332
- Page(to):
- 337
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448569 [0819448567]
- Language:
- English
- Call no.:
- P63600/5051
- Type:
- Conference Proceedings
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