Optical interferometric measurements of the static/dynamic response characteristics of MEMS ultrasonic transducers
- Author(s):
- Blackshire, J.L. ( Air Force Research Lab. (USA) )
- Sathish, S. ( Univ. of Dayton Research Institute (USA) )
- Publication title:
- Testing, Reliability, and Application of Micro- and Nano-Material Systems
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5045
- Pub. Year:
- 2003
- Page(from):
- 172
- Page(to):
- 182
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448507 [0819448508]
- Language:
- English
- Call no.:
- P63600/5045
- Type:
- Conference Proceedings
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