Blank Cover Image

Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)

Author(s):
Stanley, T.D. ( International SEMATECH (USA) )
Markle, R.J. ( Advanced Micro Devices, Inc. (USA) )
Eck, B.V. ( International SEMATECH (USA) )
Cusson, B.K. ( Advanced Micro Devices, Inc. (USA) )
Purdy, M.A. ( Advanced Micro Devices, Inc. (USA) )
Stanley, K.J. ( International SEMATECH (USA) )
1 more
Publication title:
Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5044
Pub. date:
2003
Page(from):
130
Page(to):
138
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448491 [0819448494]
Language:
English
Call no.:
P63600/5044
Type:
Conference Proceedings

Similar Items:

Raymond,C.J., Littau,M.E., Markle,R.J., Purdy,M.A.

SPIE-The International Society for Optical Engineering

Ma,K.K., Drysdale,T.D., Blaikie,R.J., Cumming,D.R.S.

SPIE-The International Society for Optical Engineering

T.D. Stanley

Electrochemical Society

DesJardin, M.A., Foot, K.J., Goralski, C.T., Ressler, R.J., Striebel, C.R., Legge, J.B.

American Institute of Chemical Engineers

Moinpour, Mansour, Bohannan, K., Shenasa, M., Sharif, A., Guzzo, G., Brestovansky, D.F., Markle, R.J., Wilkes, R.

Materials Research Society

Zeidler,A., Veenstra,K.J., Zavecz,T.E.

SPIE-The International Society for Optical Engineering

Deloughry,R.J., Al-Hassani,S.T.S., Browne,M.A., Green,R.G.

Society of Automotive Engineering, Inc.

Schneider,C., Pfitzner,L., Ryssel,H.

SPIE-The International Society for Optical Engineering

5 Conference Proceedings Advanced topics in source modeling

Kaminski, M.S., Garcia, K.J., Stevenson, M.A., Frate, M.E., Koshel, R.J.

SPIE-The International Society for Optical Engineering

Laux, P.C., Blauwkamp, K.J., Cho, P.E., Unglenieks, R.J.

Society of Automotive Engineers

Smith, T.H., Boning, D.S., Stefani, J., Butler, S.W.

Electrochemical Society

Gardner,B.K., Bernhard,R.J.

Society of Automotive Engineering, Inc.

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12