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Recursive least squares estimation and its application to shallow trench isolation

Author(s):
  • Wang, J. ( Advanced Micro Devices, Inc. (USA) )
  • Qin, S.J. ( Univ. of Texas at Austin (USA) )
  • Bode, C.A. ( Advanced Micro Devices, Inc. (USA) )
  • Purdy, M.A. ( Advanced Micro Devices, Inc. (USA) )
Publication title:
Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5044
Pub. date:
2003
Page(from):
109
Page(to):
120
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448491 [0819448494]
Language:
English
Call no.:
P63600/5044
Type:
Conference Proceedings

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