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Practical quality metrics for resolution enhancement software

Author(s):
Boone, R.E. ( Motorola, Inc. (USA) )
Lucas, K. ( Motorola, Inc. (USA) )
Wynd, R. ( Elibrium LLC (USA) )
Boatright, M. ( Motorola, Inc. (USA) )
Thompson, M.A. ( Motorola, Inc. (USA) )
Reich, A.J. ( Motorola, Inc. (USA) )
1 more
Publication title:
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5043
Pub. Year:
2003
Page(from):
162
Page(to):
171
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448484 [0819448486]
Language:
English
Call no.:
P63600/5043
Type:
Conference Proceedings

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