Cost effective strategies for ASIC masks

Cost effective strategies for ASIC masks

Author(s):

Pramanik, D. ( Numerical Technologies Inc. (USA) )
Kamberian, H.H. ( Photronics Inc. (USA) )
Progler, C.J. ( Photronics Inc. (USA) )
Sanie, M. ( Numerical Technologies Inc. (USA) )
Pinto, D. ( Numerical Technologies Inc. (USA) )

Publication title:

Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5043

Pub. Year:

2003

Page(from):

142

Page(to):

152

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448484 [0819448486]

Language:

English

Call no.:

P63600/5043

Type:

Conference Proceedings

Details

TDL ID:	ZA00013034
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Cost and performance in integrated circuit creation
Conf. info. (Number):	2003
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2003.02.27-2003.02.28

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