Blank Cover Image

Process, design, and optical proximity correction requirements for the 65-nm device generation

Author(s):
Lucas, K. ( Motorola, Inc. (USA) )
Montgomery, P. ( IMEC (Belgium) )
Litt, L.C. ( Motorola, Inc. (USA) )
Conley, W.
Postnikov, S.V.
Wu, W.
Yuan, C.-M.
Olivares, M.
Strozewski, K.
Carter, R.L.
Vasek, J.
Smith, D.
Fanucchi, E.L.
Wiaux, V. ( IMEC (Belgium) )
Vandenberghe, G.
Toublan, O. ( Mentor Graphics Corp. (France) )
Verhappen, A. ( ASML (Netherlands) )
Kuijten, J.P.
van Wingerden, J. ( Philips Research Labs. (Belgium) )
Kasprowicz, B.S. ( Photronics Inc. (USA) )
Tracy, J.W.
Progler, C.J.
Shiro, E. ( Motorola, Inc. (Russia) )
Topouzov, I.
Wimmer, K. ( Motorola (France) )
Roman, B.J. ( Motorola, Inc. (USA) )
21 more
Publication title:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5042
Pub. date:
2003
Page(from):
353
Page(to):
364
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448477 [0819448478]
Language:
English
Call no.:
P63600/5042
Type:
Conference Proceedings

Similar Items:

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Conley, W., Van Den Broeke, D.J., Socha, R.J., Wu, W., Litt, L.C., Lucas, K.D., Roman, B.J., Peters, R.D., Parker, C., …

SPIE - The International Society of Optical Engineering

Montgomery, P.K., Lucas, K.D., Litt, L.C., Conley, W., Fanucchi, E., Van Wingerden, J., Vandenberghe, G., Wiaux, V., …

SPIE - The International Society of Optical Engineering

Conley, W.E., Van Den Broeke, D.J., Socha, R.J., Wu, W., Litt, L.C., Lucas, K.D., Roman, B.J., Peters, R.D., Parker, C., …

SPIE - The International Society of Optical Engineering

Conley, W., Montgomery, P.K., Lucas, K., Litt, L.C., Maltabes, J.G., Dieu, L., Hughes, G.P., Mellenthin, D.L., Socha, …

SPIE-The International Society for Optical Engineering

Wiaux, V., Montgomery, P.K., Vandenberghe, G., Monnoyer, P., Ronse, K.G., Conley, W., Litt, L.C., Lucas, K., Finders, …

SPIE-The International Society for Optical Engineering

Kuijten, J.-P., Verhappen, A., Pijnenburg, W., Conley, W., Litt, L.C., Wu, W., Montgomery, P., Roman, B.J., Kasprowicz, …

SPIE - The International Society of Optical Engineering

Kasprowicz, B.S., Progler, C.J., Wu, W., Conley, W., Litt, L.C., Van Den Broeke, D.J., Wampler, K.E., Socha, R.J.

SPIE-The International Society for Optical Engineering

Kuijten, J. P., Verhappen, A., Conley, W., van de Goor, S., Litt, L., Wu, W., Lucas, K., Roman, B., Kasprowicz, B., …

SPIE - The International Society of Optical Engineering

Conley, W., Morgana, N., Kasprowicz, B. S., Cangemi, M., Lassiter, M., Litt, L. C., Cottle, R., Wu, W., Cobb, J., Ham, …

SPIE - The International Society of Optical Engineering

Litt, L.C., Wu, W., Conley, W., Lucas, K.D., Roman, B.J., Montgomery, P., Kasprowicz, B.S., Progler, C.J., Socha, R.J., …

SPIE - The International Society of Optical Engineering

Dieu, L., Fanucchi, E.L., Hughes, G.P., Maltabes, J.G., Mellenthin, D.L., Conley, W., Litt, L.C., Lucas, K., Socha, …

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12