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Library-based process test vehicle design framework

Author(s):
  • Doong, K.Y.-Y. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
  • Hung, L.-J. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
  • Ho, S. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
  • Lin, S.C. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
  • Young, K.L. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Publication title:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5042
Pub. Year:
2003
Page(from):
188
Page(to):
196
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448477 [0819448478]
Language:
English
Call no.:
P63600/5042
Type:
Conference Proceedings

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