Generalization of the photo process window and its application to OPC test pattern design
- Author(s):
- Eisenmann, H. ( PDF Solutions GmbH (Germany) )
- Peter, K. ( PDF Solutions GmbH (Germany) )
- Strojwas, A.J. ( PDF Solutions, Inc. (USA) and Carnegie Mellon Univ. (USA) )
- Publication title:
- Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5042
- Pub. Year:
- 2003
- Page(from):
- 42
- Page(to):
- 50
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448477 [0819448478]
- Language:
- English
- Call no.:
- P63600/5042
- Type:
- Conference Proceedings
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