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LithoCell-integrated critical dimension metrology

Author(s):
Stirton, J.B. ( Advanced Micro Devices, Inc. (USA) )
Miller, C.W. ( Advanced Micro Devices, Inc. (USA) )
Viswanathan, A. ( Tokyo Electron Texas LLC (USA) )
Miyagi, M. ( Tokyo Electron Texas LLC (USA) )
Lane, L. ( Timbre Technologies Inc. (USA) )
Laughery, M.A. ( Timbre Technologies Inc. (USA) )
Parikh, T. ( Tokyo Electron America, Inc. (USA) )
Chan, K.C. ( Sensys Instruments, Inc. (USA) )
Sezginer, A. ( Sensys Instruments, Inc. (USA) )
4 more
Publication title:
Process and Materials Characterization and Diagnostics in IC Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5041
Pub. Year:
2003
Page(from):
155
Page(to):
160
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448460 [081944846X]
Language:
English
Call no.:
P63600/5041
Type:
Conference Proceedings

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