Sidewall structure estimation from CD-SEM for lithographic process control
- Author(s):
Bingham, P.R. ( Oak Ridge National Lab. (USA) ) Price, J.R. ( Oak Ridge National Lab. (USA) ) Tobin, K.W., Jr. ( Oak Ridge National Lab. (USA) ) Karnowski, T.P. ( Oak Ridge National Lab. (USA) ) Bennett, M.H. ( International SEMATECH (USA) ) Bogardus, E.H. ( International SEMATECH (USA) ) Bishop, M. ( International SEMATECH (USA) ) - Publication title:
- Process and Materials Characterization and Diagnostics in IC Manufacturing
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5041
- Pub. Year:
- 2003
- Page(from):
- 115
- Page(to):
- 126
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448460 [081944846X]
- Language:
- English
- Call no.:
- P63600/5041
- Type:
- Conference Proceedings
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