Blank Cover Image

Outlier rejection with mixture models in alignment

Author(s):
Nakajima, S. ( Nikon Corp. (Japan) )
Kanaya, Y. ( Nikon Corp. (Japan) )
Li, M. ( Nikon Tech Corp. (Japan) )
Sugihara, T. ( Nikon Corp. (Japan) )
Sukegawa, A. ( Nikon Corp. (Japan) )
Magome, N. ( Nikon Corp. (Japan) )
1 more
Publication title:
Optical Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
Pub. Year:
2003
Vol.:
Part Three
Page(from):
1729
Page(to):
1741
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448453 [0819448451]
Language:
English
Call no.:
P63600/5040
Type:
Conference Proceedings

Similar Items:

Nagayama, T., Nakajima, S., Sugaya, A., Kanaya, Y., Sukegawa, A.

SPIE-The International Society for Optical Engineering

Nagayama, T., Yasuda, M., Kanaya, Y., Masada, T., Sugaya, A.

SPIE - The International Society of Optical Engineering

Sugaya, A., Kanaya, Y., Nakajima, S., Nagayama, T., Shiraishi, N.

SPIE-The International Society for Optical Engineering

A. J. Hazelton, S. Wakamoto, S. Hirukawa, M. McCallum, N. Magome

Society of Photo-optical Instrumentation Engineers

Kanaya, Y., Nakajima, S.

SPIE - The International Society of Optical Engineering

Nakajima,S., Tanigawa,M., Ishihama,A., Sakiyama,K.

SPIE-The International Society for Optical Engineering

Nakajima,S., Kanaya,Y., Takahashi,A., Yoshida,K., Mizutani,H.

SPIE-The International Society for Optical Engineering

Shibata, S., Sugihara, O., Kaino, T., Okamoto, N.

SPIE - The International Society of Optical Engineering

Sukegawa, A., Wakamoto, S., Nakajima, S., Kawakubo, M., Maome, N.

SPIE - The International Society of Optical Engineering

11 Conference Proceedings Alignment in chromeless masks

Mukherjee-Roy, M., Singh, N., Mehta, S.S., Suda, H., Kubota, T., Kimura, Y., Kinoshita, H.

SPIE - The International Society of Optical Engineering

Tanaka, R., Kobayashi, M., Yasuda, M., Magome, N., Ishigo, K., Ikegami, H., Higashiki, T.

SPIE - The International Society of Optical Engineering

K. Sugihara, S. Suzuki, H. Nakajima

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12