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Resist footing variation and compensation over nonplanar wafer

Author(s):
Sato, T. ( Toshiba Corp. (Japan) )
Endo, A. ( Toshiba Corp. (Japan) )
Hashimoto, K. ( Toshiba Corp. (Japan) )
Inoue, S. ( Toshiba Corp. (Japan) )
Shibata, T. ( Toshiba Corp. (Japan) )
Kobayashi, Y. ( Toshiba Corp. (Japan) )
1 more
Publication title:
Optical Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
Pub. Year:
2003
Vol.:
Part Three
Page(from):
1521
Page(to):
1528
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448453 [0819448451]
Language:
English
Call no.:
P63600/5040
Type:
Conference Proceedings

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