Tool ranking using aberration measurements in a high-volume manufacturing facility

Tool ranking using aberration measurements in a high-volume manufacturing facility

Author(s):

Garza, C.M. ( Motorola, Inc. (USA) )

Warrick, S.P. ( Motorola, Inc. (USA) )

Seligman, G.S. ( Motorola, Inc. (USA) )

Zavyalova, L.V. ( Motorola, Inc. (USA) )

Zwol, A. ( ASML (USA) )

Foster, J. ( ASML (USA) )

1 more

Publication title:

Optical Microlithography XVI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5040

Pub. Year:

2003

Vol.:

Part Three

Page(from):

1432

Page(to):

1440

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448453 [0819448451]

Language:

English

Call no.:

P63600/5040

Type:

Conference Proceedings

Details

TDL ID:	ZA00013031
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2003 : 16th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2003.02.25-2003.02.28

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