Blank Cover Image

Sub-100-nm DRAM cell patterning results and relation with lens aberration at 248-nm lithography era

Author(s):
You, T.-J. ( Hynix Semiconductor Inc. (South Korea) )
Kim, H.S. ( Hynix Semiconductor Inc. (South Korea) )
Kim, J.-S. ( Hynix Semiconductor Inc. (South Korea) )
Kim, S.-K. ( Hynix Semiconductor Inc. (South Korea) )
Kim, Y.-D. ( Hynix Semiconductor Inc. (South Korea) )
Youn, H.S. ( Hynix Semiconductor Inc. (South Korea) )
Kong, K.-K. ( Hynix Semiconductor Inc. (South Korea) )
2 more
Publication title:
Optical Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
Pub. date:
2003
Vol.:
Part Three
Page(from):
1327
Page(to):
1334
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448453 [0819448451]
Language:
English
Call no.:
P63600/5040
Type:
Conference Proceedings

Similar Items:

Kim, Y.-S., You, T.J., Kim, J.-S., Kim, S.-K., Kong, K.-K., Kim, Y.-D., Kim, H.S.

SPIE-The International Society for Optical Engineering

Lim, C.-M., Eom, T.-S., Kim, S.-M., Bok, C., Ma, W.-K., Park, G.-D., Moon, S.-C., Kim, J.-W.

SPIE - The International Society of Optical Engineering

Kim, S.-K., Kim, J.-S., Yoo, T.-J., Kong, K.-K., Yun, H.-S., Kim, Y.-D., Kim, H.-R., Kim, Y.-S., Kim, H.S.

SPIE-The International Society for Optical Engineering

Lee,G., Koh,C.-W., Jung,J.-C., Jung,M.-H., Kong,K.-K., Kim,J.-S., Shin,K.-S., Choi,S.-J., Kim,Y.-S., Choi,Y.-J., …

SPIE-The International Society for Optical Engineering

Kim, Y.-S., Hyun, Y.-S., Kong, K.-K., Kim, H., Choi, B.-H.

SPIE - The International Society of Optical Engineering

Choi, S.-H., Park, T.-H., Kim, E., Youn, H.-J., Lee, D.-Y., Ban, Y.-C., Je, A.-Y., Kim, D.-H., Hong, J.-S., Kim, Y.-H., …

SPIE - The International Society of Optical Engineering

Lee, J.-H., Chung, D.-H., Cha, D.-C., Kim, H.-S., Park, J.-S., Nam, D.-G., Woo, S.-K., Cho, H.-S., Han, W.-S.

SPIE-The International Society for Optical Engineering

Kim, S.-K., Bok, C.-K., Shin, K.-S.

SPIE-The International Society for Optical Engineering

Lee, J.-H., Chung, D.-H., Kim, H.-C., Nam, D.-S., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE-The International Society for Optical Engineering

11 Conference Proceedings 0.33-k1 ArF lithography for 100-nm DRAM

Bok, C.K., Kim, S.-K., Kim, H.-B., Oh, J.-S., Ahn, C.-N., Shin, K.-S.

SPIE-The International Society for Optical Engineering

Kim, J.-, Kim, S.-J., Chin, S.-B., Oh, S.-H., Goo, D.-H., Lee, S.-J., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T., …

SPIE - The International Society of Optical Engineering

Lee, S., Hwang, C., Park, D.-W., Kim, I.-S., Kim, H.-C., Woo, S.-G., Cho, H.-K., Moon, J.-T.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12