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Ambient effects on the laser durability of 157-nm optical coatings

Author(s):
Liberman, V. ( MIT Lincoln Lab. (USA) )
Rothschild, M. ( MIT Lincoln Lab. (USA) )
Palmacci, S.T. ( MIT Lincoln Lab. (USA) )
Efremow, N.N., Jr. ( MIT Lincoln Lab. (USA) )
Sedlacek, J.H.C. ( MIT Lincoln Lab. (USA) )
Grenville, A. ( Intel SEMATECH (USA) )
1 more
Publication title:
Optical Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
Pub. Year:
2003
Vol.:
Part One
Page(from):
487
Page(to):
498
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448453 [0819448451]
Language:
English
Call no.:
P63600/5040
Type:
Conference Proceedings

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