Blank Cover Image

157-nm lithography for 65-nm node SRAM-gate

Author(s):
Suganaga, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Irie, S. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Miyoshi, S. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Kim, J.-H. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Watanabe, K. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Kurose, E. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Furukawa, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Hagiwara, T. ( Semiconductor Leading Edge Technologies, Inc (Japan) )
Ishimaru, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Itani, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
5 more
Publication title:
Optical Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
Pub. Year:
2003
Vol.:
Part One
Page(from):
261
Page(to):
269
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448453 [0819448451]
Language:
English
Call no.:
P63600/5040
Type:
Conference Proceedings

Similar Items:

Suganaga, T., Watanabe, K., Matsuura, S., Hagiwara, T., Furukawa, T., Itani, T., Fujii, K.

SPIE - The International Society of Optical Engineering

Watanabe, K., Kurose, E., Suganaga, T., Itani, T.

SPIE-The International Society for Optical Engineering

Suganaga, T., Lee, J.-W., Kurose, E., Ishimaru, T., Furukawa, T., Itani, T., Fujii, K., Cashmore, J.S., Gower, M.

SPIE - The International Society of Optical Engineering

Kitano, J., Kiba, Y., Inazawa, K., Miyoshi, S., Watanabe, H., Furukawa, T., Itani, T.

SPIE-The International Society for Optical Engineering

Suganaga, T., Kanda, N., Kim, J.-H., Yamabe, O., Watanabe, K., Furukawa, T., Miyoshi, S., Itani, T., Cashmore, J.S., …

SPIE-The International Society for Optical Engineering

Irie, S., Kanda, N., Watanabe, K., Suganaga, T., Itani, T.

SPIE-The International Society for Optical Engineering

Miyoshi, S., Furukawa, T., Watanabe, H., Irie, S., Itani, T.

SPIE-The International Society for Optical Engineering

Kurose, E., Watanabe, K., Suganaga, T., Itani, T., Fujii, K.

SPIE - The International Society of Optical Engineering

Watanabe, K., Yamabe, O., Kanda, N., Kim, J., Uchida, N., Irie, S., Suganaga, T., Itani, T.

SPIE-The International Society for Optical Engineering

Watanabe, K., Hagiwara, T., Matsuura, S., Suganaga, T., Itani, T., Fujii, K.

SPIE - The International Society of Optical Engineering

Watanabe, K., Kurose, E., Suganaga, T., Itani, T.

SPIE-The International Society for Optical Engineering

Otoguro, A., Irie, S., Ishimaru, T., Suganaga, T., Itani, T., Fujii, K.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12