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Evaluation of ArF CLM in the sub-100-nm DRAM cell

Author(s):
Lee, J.-H. ( Samsung Electronics Co., Ltd. (South Korea) )
Chung, D.-H. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, H.-C. ( Samsung Electronics Co., Ltd. (South Korea) )
Nam, D.-S. ( Samsung Electronics Co., Ltd. (South Korea) )
Woo, S.-G. ( Samsung Electronics Co., Ltd. (South Korea) )
Cho, H.-K. ( Samsung Electronics Co., Ltd. (South Korea) )
Han, W.-S. ( Samsung Electronics Co., Ltd. (South Korea) )
2 more
Publication title:
Optical Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
Pub. Year:
2003
Vol.:
Part One
Page(from):
251
Page(to):
260
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448453 [0819448451]
Language:
English
Call no.:
P63600/5040
Type:
Conference Proceedings

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