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Resist cracking and adhesion improvement

Author(s):
Lee, I.-H. ( Anam Semiconductor Inc. (South Korea) )
Lee, J.-S. ( Anam Semiconductor Inc. (South Korea) )
Lee, K.-Y. ( Anam Semiconductor Inc. (South Korea) )
Park, C.-G. ( Shipley Far East Ltd. (Japan) )
Choi, J.-S. ( Anam Semiconductor Inc. (South Korea) )
Lee, J. ( Anam Semiconductor Inc. (South Korea) )
1 more
Publication title:
Advances in Resist Technology and Processing XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5039
Pub. Year:
2003
Vol.:
2
Pt.:
Poster Session
Page(from):
1444
Page(to):
1452
Pages:
9
Pub. info.:
Bellingham, CA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448446 [0819448443]
Language:
English
Call no.:
P63600/5039
Type:
Conference Proceedings

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