Blank Cover Image

Fabrication of integrated circuits with high yield using ultra-thin resist processes

Author(s):
Peters, R.D. ( Motorola Digital DNA Labs. (USA) )
Postnikov, S.V. ( Motorola Digital DNA Labs. (USA) )
Cobb, J.L. ( Motorola Digital DNA Labs. (USA) )
Dakshina-Murthy, S. ( Advanced Micro Devices,INC. (USA) )
Stephens, T. ( Motorola Digital DNA Labs. (USA) )
Parker, C. ( Motorola Digital DNA Labs. (USA) )
Luckowski, E. ( Motorola Digital DNA Labs. (USA) )
Martinez, A.M. Jr., ( Motorola Digital DNA Labs. (USA) )
Wu, W. ( Motorola Digital DNA Labs. (USA) )
Hector, S.D. ( Motorola Digital DNA Labs. (USA) )
5 more
Publication title:
Advances in resist technology and processing XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5039
Pub. date:
2003
Vol.:
2
Pt.:
Poster Session
Page(from):
1390
Page(to):
1401
Pages:
12
Pub. info.:
Bellingham, CA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448446 [0819448443]
Language:
English
Call no.:
P63600/5039
Type:
Conference Proceedings

Similar Items:

Cobb, J.L., Dakshina-Murthy, S., Parker, C., Luckowski, E., Martinez, A.M., Peters, R.D., Wu, W., Hector, S.D.

SPIE-The International Society for Optical Engineering

Amblard, G.R., Peters, R., Cobb, J.L., Edamatsu, K.

SPIE-The International Society for Optical Engineering

Cobb, J.L., Rauf, S., Thean, A., Dakshina-Murthy, S., Stephens, T., Parker, C., Peters, R.D., Rao, V.

SPIE-The International Society for Optical Engineering

Zhu, Z., Lucas, K.D., Cobb, J.L., Hector, S.D., Strojwas, A.J.

SPIE - The International Society of Optical Engineering

Cobb,J.L., Conley,W., Guenther,T., Huang,F., Lee,J.J., Lii,T., Dakshina-Murthy,S., Parker,C., Usmani,S., Wu,W., …

SPIE-The International Society for Optical Engineering

Zhu, Z., Lucas, K., Cobb, J.L., Hector, S.D., Strojwas, A.J.

SPIE-The International Society for Optical Engineering

Hector, S.D., Postnikov, S.V., Cobb, J.

SPIE - The International Society of Optical Engineering

Hector,S.D., Cobb,J.L., Ivin,V., Silakov,M.V., Babushkin,G.

SPIE-The International Society for Optical Engineering

Peters, R.D., Parker, C., Cobb, J., Luckowski, E., Weisbrod, E., Dauksher, B.

SPIE - The International Society of Optical Engineering

Han, S.-I., Wasson, J.R., Mangat, P.J.S., Cobb, J.L., Lucas, K., Hector, S.D.

SPIE-The International Society for Optical Engineering

Cobb, J., Peters, R., Postnikov, S., Hector, S.D., Lu, B., Weisbrod, E., Wasson, J.R., Mangat, P., O'Connell, D.

SPIE - The International Society of Optical Engineering

Peters, R.D., Lucas, K., Cobb, J.L., Parker, C., Patterson, K., McCauley, R., Ercken, M., Roey, F.V., Vandenbroeck, N., …

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12